Error Analysis and Correction of a High Precision Co-ordinate Table
نویسنده
چکیده
A small scale, high precision co-ordinate table was developed as part of a project to solve measurement problems originating from microtechnic. Construction with a single reference surface was selected and vacuum preloaded air bearing applied in order to enable smooth motion and eliminate stick slip. Laser interferometers were applied to measure both the displacement and the angular error. The paper describes the mathematical evaluation of the measuring system’s error and how that is taken into account in the evaluation software.
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تاریخ انتشار 2005